B-4 Nano-scale surface finishings

[B-4-3] Experimental Investigation of Torques Acting on Upper and Lower Platens in Double-sided Lapping

〇Ryo Ozaki¹, Yohei Hashimoto¹, Hinako Hashimoto¹, Tatsuaki Furumoto¹, Tomohiro Koyano¹, Akira Hosokawa¹ (1.Kanazawa University)

Keywords:Polishing、Torque、Slurry supplied state、Carrier、