B-4 Nano-scale surface finishings

[B-4-4] Liquid-electrolyte-free electrochemical surface finishing of GaN surface using a solid polymer electrolyte

〇Junji Murata¹, Yoshito Nishiguchi² (1.Ritsumeikan University, 2.Kindai University)

Keywords:Polishing、electrochemical treatment、solid polymer electrolyte