Uncertainty evaluation of form error measurement of probe tip ball using a rotating reference sphere

[D-1-10] Uncertainty evaluation of form error measurement of probe tip ball using a rotating reference sphere

〇So Ito¹, Daichi Kato¹, Daisuke Tsutsumi¹, Kazuhide Kamiya¹, Kimihisa Matsumoto¹ (1.Toyama Prefectural University)

Keywords:Measurement、probing system、calibration、form error、rotating reference sphere