Aspheric Optical Element Testing with the Three-dimensional Nanoprofiler Based on Normal Vector Tracing Method

[D-1-9] Aspheric Optical Element Testing with the Three-dimensional Nanoprofiler Based on Normal Vector Tracing Method

〇Takeshi Ashizawa¹, Kota Hashimoto¹, Mikiya Ikuchi¹, Jungmin Kang², Katsuyoshi Endo¹ (1.Osaka University, 2.IMRAM, Tohoku University)

Keywords:Measurement、Three-dimensional Profiler、Surface figure、Optical element、Uncertainty