D-1 Nano-scale measurements and calibrations

[D-1-10] Uncertainty evaluation of form error measurement of probe tip ball using a rotating reference sphere

〇So Ito¹、Daichi Kato¹、Daisuke Tsutsumi¹、Kazuhide Kamiya¹、Kimihisa Matsumoto¹ (1.Toyama Prefectural University)

キーワード：Measurement、probing system、calibration、form error、rotating reference sphere