D-1 Nano-scale measurements and calibrations

[D-1-14] Development of Apparatus for In-line Total Inspection of Burr and Dimension

Tatsuki Otsubo¹, 〇Wang Jingwei¹, Takanori Yazawa¹, Yosuke Miyazaki² (1.Nagasaki University, 2.YANMAR HOLDINGS CO., LTD.)

Keywords:Measurement、In-line Inspection、Spatial Frequency Filter