D-1 Nano-scale measurements and calibrations

[D-1-14] Development of Apparatus for In-line Total Inspection of Burr and Dimension

Tatsuki Otsubo¹、〇Wang Jingwei¹、Takanori Yazawa¹、Yosuke Miyazaki² (1.Nagasaki University、2.YANMAR HOLDINGS CO., LTD.)

キーワード：Measurement、In-line Inspection、Spatial Frequency Filter