D-1 Nano-scale measurements and calibrations

[D-1-16] Fabrication of Three Dimensional High Aspect Ratio Structure by Oblique incident Talbot Lithography

〇Ryu Ezaki¹, Yasuhiro Mizutani¹, Yoshihiko Makiura², Yasuhiro Takaya¹ (1.Osaka University, 2.KURABO INDUSTRIES LTD.,)

Keywords:Processing、Talbot effect、interference lithography、periodic structure、