D-1 Nano-scale measurements and calibrations

[D-1-16] Fabrication of Three Dimensional High Aspect Ratio Structure by Oblique incident Talbot Lithography

〇Ryu Ezaki¹、Yasuhiro Mizutani¹、Yoshihiko Makiura²、Yasuhiro Takaya¹ (1.Osaka University、2.KURABO INDUSTRIES LTD.,)

キーワード：Processing、Talbot effect、interference lithography、periodic structure、