D-1 Nano-scale measurements and calibrations

[D-1-4] Optical detection of fine particulate defects with autonomous search-and-split liquid probe

-Detection of nanoscale defects on Si wafer by highly sensitive observation system using phase contrast microscopy-

〇Chikara Odagiri¹、Shotaro Kadoya¹、Masaki Michihata¹、Kiyoshi Takamasu¹、Satoru Takahashi¹ (1.The University of Tokyo.)

キーワード：Simulation、detect inspection & surface inspection、optical measurement、nanoscale particulate defects、phase contrast microscopy