D-1 Nano-scale measurements and calibrations

[D-1-5] Detection of Surface Roughness by Ellipsometry based on Spin Hall Effect of Light

〇Zhehan Li¹, Yasuhiro Mizutani¹, Yasuhiro Takaya¹ (1.Osaka University)

Keywords:Measurement、spin Hall effect of light、ellipsometry、surface roughness、weak measurement