Dimensional measurement of micrometer-scale aperture using a surface interaction force detection type microprobe

[D-1-6] Dimensional measurement of micrometer-scale aperture using a surface interaction force detection type microprobe

〇Daichi Kato¹, So Ito¹, Kazuhide Kamiya¹, Kimihisa Matsumoto¹ (1.Toyama Prefectural University)

Keywords:Measurement、Microprobe、Probing system、Surface interaction force、Diameter measurement