ICPE2020

講演情報

Oral Sessions

D-1 Nano-scale measurements and calibrations

[D-1-5] Detection of Surface Roughness by Ellipsometry based on Spin Hall Effect of Light

〇Zhehan Li1、Yasuhiro Mizutani1、Yasuhiro Takaya1 (1.Osaka University)

キーワード:Measurement、spin Hall effect of light、ellipsometry、surface roughness、weak measurement