D-1 Nano-scale measurements and calibrations

[D-1-6] Dimensional measurement of micrometer-scale aperture using a surface interaction force detection type microprobe

〇Daichi Kato¹、So Ito¹、Kazuhide Kamiya¹、Kimihisa Matsumoto¹ (1.Toyama Prefectural University)

キーワード：Measurement、Microprobe、Probing system、Surface interaction force、Diameter measurement