D-1 Nano-scale measurements and calibrations

[D-1-9] Aspheric Optical Element Testing with the Three-dimensional Nanoprofiler Based on Normal Vector Tracing Method

〇Takeshi Ashizawa¹、Kota Hashimoto¹、Mikiya Ikuchi¹、Jungmin Kang²、Katsuyoshi Endo¹ (1.Osaka University、2.IMRAM, Tohoku University)

キーワード：Measurement、Three-dimensional Profiler、Surface figure、Optical element、Uncertainty