Study on non-destructive optical depth measurement of periodic micro-structured surfaces beyond diffraction limit

[D-2-4] Study on non-destructive optical depth measurement of periodic micro-structured surfaces beyond diffraction limit

〇Yosho Kanda¹, Hiromasa Kume¹, Shotaro Kadoya¹, Masaki Michihata¹, Kiyoshi Takamasu¹, Satoru Takahashi¹ (1.The University of Tokyo)

Keywords:Measurement、depth measurement、periodic structure、 optical measurement、diffraction limit