D-2 Surface metrologies of nano-scale structures

[D-2-4] Study on non-destructive optical depth measurement of periodic micro-structured surfaces beyond diffraction limit

〇Yosho Kanda¹、Hiromasa Kume¹、Shotaro Kadoya¹、Masaki Michihata¹、Kiyoshi Takamasu¹、Satoru Takahashi¹ (1.The University of Tokyo)

キーワード：Measurement、depth measurement、periodic structure、 optical measurement、diffraction limit