F-1 Advanced surface processings

[F-1-1] Surface nanostructuring of silicon by intermediate-pressure hydrogen plasma treatment

〇Toshimitsu Nomura¹, Kenta Kimoto¹, Hiroaki Kakiuchi¹, Kiyoshi Yasutake¹, Hiromasa Ohmi¹ (1.Osaka university)

Keywords:Surface treatment、hydrogen plasma、optical management