F-1 Advanced surface processings

[F-1-3] Plasma chemical vaporization machining of Ga₂O₃ using chlorine-based gas

〇Taiki Sai¹, Yuma Nakanishi¹, Satoshi Matsuyama¹, Kazuto Yamauchi¹, Yasuhisa Sano¹ (1.Osaka University)

Keywords:Surface treatment、Etching、Ga2O3、PCVM、