F-1 Advanced surface processings

[F-1-3] Plasma chemical vaporization machining of Ga₂O₃ using chlorine-based gas

〇Taiki Sai¹、Yuma Nakanishi¹、Satoshi Matsuyama¹、Kazuto Yamauchi¹、Yasuhisa Sano¹ (1.Osaka University)

キーワード：Surface treatment、Etching、Ga2O3、PCVM、