B-3 Micro/Nano machining and figurings

[P-10] Research on Projection Exposure Using Quarter-Millimeter Squared Optical Fibers

〇Fuga Yoshida¹, Kazumori Yoshida¹, Yuta Suzuki¹, Junya Iwasaki¹, Toshiyuki Horiuchi¹, Hiroshi Kobayashi¹ (1.Tokyo Denki University)

Keywords:Engineering、optical fiber、light emitting diodes、fiber array、