B-3 Micro/Nano machining and figurings

[P-9] Micropowder Blasting with Mask Temperature Control for Microchannel Fabrication in Glass Microfluidics

〇Mikinari Takada¹, Hiromasa Yagyu¹ (1.Kanto Gakuin University)

Keywords:Machining、Viscoelasticity、Microchannel