ICSCRM2019

Presentation information

Print

Oral Presentation

Growth and Wafer Manufacturing

[Fr-2B] Wafer Manufacturing

Fri. Oct 4, 2019 10:30 AM - 11:45 AM Annex Hall 2 (Kyoto International Conference Center)

11:15 AM - 11:30 AM

[Fr-2B-03] Slurryless electrochemical mechanical polishing of 4H-SiC (0001) surfaces

*Xu Yang1, Xiaozhe Yang1, Kentaro Kawai1, Kenta Arima1, Kazuya Yamamura1 (1. Osaka University(Japan))