Direct bonding of diamond substrate at low temperatures under atmospheric condition

Presentation information

Oral Presentation

Growth and Wafer Manufacturing

Fri. Oct 4, 2019 10:30 AM - 11:45 AM Annex Hall 2 (Kyoto International Conference Center)

11:30 AM - 11:45 AM

*Takashi Matsumae¹, Yuichi Kurashima¹, Hitoshi Umezawa¹, Hideki Takagi¹ (1. Ntl. Inst. of Adv. Ind. Sci. and Tech.(Japan))