[Fr-3B] Device-related Characterization

[Fr-3B-05LN] Microscopic FCA system for carrier lifetime measurement in SiC with high spatial resolution

*Keisuke Nagaya¹, Takashi Hirayama¹, Takeshi Tawara^2,3, Koichi Murata⁴, Hidekazu Tsuchida⁴, Akira Miyasaka⁵, Kazutoshi Kojima³, Tomohisa Kato³, Hajime Okumura³, Masashi Kato¹ (1. Nagoya Inst.(Japan), 2. Fuji Electric Co., Ltd.(Japan), 3. AIST(Japan), 4. CRIEPI(Japan), 5. Showa Denko(Japan))