[Mo-P] Poster Presentation

[Mo-P-19] Improved high precision dopant / carrier concentration profiling with corona-charge non-contact C-V (CnCV)

*Alexandre Savtchouk¹, Marshall Wilson¹, John D'Amico¹, Carlos Almeida¹, Jacek Lagowski¹ (1. Semilab SDI(United States of America))