ICSCRM2019

講演情報

印刷

Poster Presentation

Poster Presentation

[Mo-P] Poster Presentation

2019年9月30日(月) 15:45 〜 17:45 Annex Hall 1 (Kyoto International Conference Center)

15:45 〜 17:45

[Mo-P-31] 3×1018 - 1×1019 cm-3 Al+ Ion Implanted 4H-SiC: Annealing Time Effect

Roberta Nipoti1, *Antonella Parisini2, Virginia Boldrini1, Salvatore Vantaggio2, Maria Concetta Canino1, Filippo Bonafè1, Giovanni Alfieri3 (1. CNR-IMM of Bologna(Italy), 2. Parma Univ., DMPCS - CNISM(Italy), 3. ABB(Switzerland))