ICSCRM2019

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Poster Presentation

Poster Presentation

[Mo-P] Poster Presentation

Mon. Sep 30, 2019 3:45 PM - 5:45 PM Annex Hall 1 (Kyoto International Conference Center)

3:45 PM - 5:45 PM

[Mo-P-31] 3×1018 - 1×1019 cm-3 Al+ Ion Implanted 4H-SiC: Annealing Time Effect

Roberta Nipoti1, *Antonella Parisini2, Virginia Boldrini1, Salvatore Vantaggio2, Maria Concetta Canino1, Filippo Bonafè1, Giovanni Alfieri3 (1. CNR-IMM of Bologna(Italy), 2. Parma Univ., DMPCS - CNISM(Italy), 3. ABB(Switzerland))