Schedule 5 3:45 PM - 5:45 PM [Mo-P-34] Intentional and unintentional channeling during implantation of p-dopants in 4H-SiC *Margareta K Linnarsson1, Anders Hallen1, Lasse Vines2 (1. KTH Royal Institute of Technology(Sweden), 2. Univ. of Oslo(Norway))
