ICSCRM2019

Presentation information

Poster Presentation

Poster Presentation

[Th-P] Poster Presentation

Thu. Oct 3, 2019 1:45 PM - 3:45 PM Annex Hall 1 (Kyoto International Conference Center)

1:45 PM - 3:45 PM

[Th-P-01] Modified hot-zone design of growth cell for reducing the warpage of 6”-SiC wafer

*Byung-Kyu Jang1, Jonghwi Park1, Jung-Woo Choi1, Eunsu Yang1, Jung-Gyu Kim1, Sang-Ki Ko1, Myung-Ok Kyun1, Kap-Ryeol Ku1, Yeon-Suk Jang2, WON JAE LEE1,2 (1. SKC(Korea), 2. Dongeui Univ.(Korea))