[Th-P] Poster Presentation

[Th-P-01] Modified hot-zone design of growth cell for reducing the warpage of 6”-SiC wafer

*Byung-Kyu Jang¹, Jonghwi Park¹, Jung-Woo Choi¹, Eunsu Yang¹, Jung-Gyu Kim¹, Sang-Ki Ko¹, Myung-Ok Kyun¹, Kap-Ryeol Ku¹, Yeon-Suk Jang², WON JAE LEE^1,2 (1. SKC(Korea), 2. Dongeui Univ.(Korea))