Schedule 3 1:45 PM - 3:45 PM [Th-P-08] A New Permanganate-Free Slurry for GaN-SiC CMP Applications *Treliant Fang1, Ping-Chung Chen2, Ming-Hsun Lee2 (1. Flux Research Institute, LLC(United States of America), 2. Scientech Corp., Ltd.(Taiwan))
