スケジュール 6 11:30 〜 11:45 [Tu-2A-03] Field Stabilizing Trench-Etched DMOS for Suppression of Performance Variation *Takeru Suto1, Naoki Watanabe1, Yuan Bu1, Hiroshi Miki1, Naoki Tega1, Yuki Mori1, Digh Hisamoto1, Akio Shima1 (1. Hitachi, Ltd.(Japan))