ICSCRM2019

講演情報

Oral Presentation

Growth and Wafer Manufacturing

[Tu-2B] Sublimation Bulk Growth

2019年10月1日(火) 10:45 〜 12:30 Annex Hall 2 (Kyoto International Conference Center)

11:15 〜 11:30

[Tu-2B-02] Growth of 50 mm useable height 150 mm 4H-SiC, defect conversion and reduction by thermal treatment and their characterization

*SRaghavan Parthasarathy1, Roman Drachev1, Bob Berliner1, Bala Bathey1, Henry Chou1 (1. GT Advanced Technologies Tech(United States of America))