ICSCRM2019

講演情報

印刷

Oral Presentation

Growth and Wafer Manufacturing

[Tu-2B] Sublimation Bulk Growth

2019年10月1日(火) 10:45 〜 12:30 Annex Hall 2 (Kyoto International Conference Center)

11:30 〜 11:45

[Tu-2B-03] Growth and Characterization of Al-Doped p-type 4H-SiC Grown by PVT

*Kazuma Eto1, Hiromasa Suo1,2, Tomohisa Kato1, Hajime Okumura1 (1. National Institute of Advanced Industrial Science and Technology (AIST)(Japan), 2. Showa Denko K. K.(Japan))