ICSCRM2019

講演情報

印刷

Oral Presentation

Growth and Wafer Manufacturing

[Tu-2B] Sublimation Bulk Growth

2019年10月1日(火) 10:45 〜 12:30 Annex Hall 2 (Kyoto International Conference Center)

11:45 〜 12:00

[Tu-2B-04] Prospects of bulk growth of 3C-SiC using sublimation growth

*Peter J Wellmann1, Philipp Schuh1, M. Schöler1, J. Steiner1, M. Zielinski2, M. Mauceri3, G. Litrico4, F. La Via4 (1. Univ. of Erlangen (FAU)(Germany), 2. NOVASIC(France), 3. LPE S.P.A.(Italy), 4. CNR-IMM(Italy))