[Tu-3B] Quantum Technology II

[Tu-3B-04] Optically detected magnetic resonance study of 3D arrayed silicon vacancies in SiC pn diodes

*Yuichi Yamazaki¹, Yoji Chiba^1,2, Shin-ichiro Sato¹, Takahiro Makino¹, Naoto Yamada¹, Takahiro Satoh¹, Kazutoshi Kojima³, Yasuto Hijikata², Hidekazu Tsuchida⁴, Norihiro Hoshino⁴, Takeshi Ohshima¹ (1. National Institutes for Quantum and Radiological Science and Technology(Japan), 2. Saitama Univ.(Japan), 3. National Institute of Advanced Industrial Science and Technology(Japan), 4. Central Research Institute of Electric Power Industry(Japan))