ICSCRM2019

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Poster Presentation

Poster Presentation

[Tu-P] Poster Presentation

Tue. Oct 1, 2019 4:15 PM - 6:15 PM Annex Hall 1 (Kyoto International Conference Center)

4:15 PM - 6:15 PM

[Tu-P-01] 3C-SiC Bulk Growth: Effect of Growth Rate and Doping on Defects and Stress

*Francesco La Via1, Marco Mauceri2, Cristiano Calabretta1, Massimo Zimbone1, Ruggero Anzalone3 (1. CNR-IMM(Italy), 2. LPE(Italy), 3. STMicroelectronics(Italy))