ICSCRM2019

Presentation information

Poster Presentation

Poster Presentation

[Tu-P] Poster Presentation

Tue. Oct 1, 2019 4:15 PM - 6:15 PM Annex Hall 1 (Kyoto International Conference Center)

4:15 PM - 6:15 PM

[Tu-P-19] Impact of threading dislocations detected by KOH etching on 4H-SiC 650 V MOSFET device failure after reliability test

*Andrea Severino1, Ruggero Anzalone1, Nicolo' Piluso1, Cirino Rapisarda1, Alfio Russo1, Beatrice Carbone1, Santi Alessandrino1, Salvo Coffa1 (1. STMicroelectronics(Italy))