[Tu-P] Poster Presentation

[Tu-P-31] Ohmic contact mechanism of Ni contact to C-faced 4H-n-SiC substrate

*Seongjun Kim¹, Minwho Lim², Hong-Ki Kim¹, Min-Jae Kang¹, Hahye Choi¹, Nam-Suk Lee¹, Tobias Erlbacher², Anton Bauer², Hoon-Kyu Shin¹ (1. Pohang Univ. of Sci. and Tech.(Korea), 2. Fraunhofer Inst. for Integrated Systems and Device Tech. (IISB)(Germany))