ICSCRM2019

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Poster Presentation

Poster Presentation

[Tu-P] Poster Presentation

Tue. Oct 1, 2019 4:15 PM - 6:15 PM Annex Hall 1 (Kyoto International Conference Center)

4:15 PM - 6:15 PM

[Tu-P-36] Development of High-Quality Gate Oxides on 4H-SiC Using Atomic Layer Deposition

*Benjamin Renz1, Oliver James Vavasour1, Peter Michael Gammon1, Fan Li1, Guy William Clarke Baker1, Philip Mawby1, Vishal Ajit Shah1 (1. Univ. of Warwick(UK))