ICSCRM2019

Presentation information

Poster Presentation

Poster Presentation

[Tu-P] Poster Presentation

Tue. Oct 1, 2019 4:15 PM - 6:15 PM Annex Hall 1 (Kyoto International Conference Center)

4:15 PM - 6:15 PM

[Tu-P-51LN] GaN epitaxial growth on 4 degree off-axis Si- and C-face 4H-SiC without buffer layer by tri-halide vapor phase epitaxy

*KAZUKUNI HARA1,2, Junji Ohara1, Daisuke Uematsu1, Shoichi Onda2 (1. DENSO Corp.(Japan), 2. Nagoya Univ.(Japan))