[We-P] Poster Presentation

[We-P-09] Reducing On-Resistance for SiC Diodes by Thin Wafer and Laser Anneal Technology

*Oleg Rusch¹, Carsten Hellinger¹, Jonathan Moult², Yunji Corcoran², Tobias Erlbacher^1,3 (1. Fraunhofer Institute for Integrated Systems and Device Technology IISB(Germany), 2. SMC Diode Solutions, Sangdest Microelectronics(China), 3. Chair of Electron Devices, Friedrich-Alexander-Universität Erlangen-Nürnberg(Germany))