[AMDp1] Oxide TFTs

[AMDp1-20L] The Development of Back-Channel-Etch Amorphous InGaZnO Thin-Film Transistors with Color Filter on Array Structure for 31 inch 120 Hz 4K GOA LCD

*GongTan Li^1,2, Feng Zhu², Wei Wu², ShiMin Ge², Shan Li², Hyun Sik Seo³, Hang Zhou¹ (1. Peking University (China), 2. Shenzhen China Star Optoelectronics Technology Co., Ltd (China), 3. Shenzhen TCL New Technology Co., LTD (China))

Keywords:Back-Channel-Etch, InGaZnO, GOA, Color Filter on Array

The BCE a-IGZO TFT covered by Red C/F shows more negative V_th, which can be suppressed by optimized PV1 deposition condition. After two month storage, the BCE a-IGZO TFT with good PBTS stability shows poor NBTS stability. We used SiO_x/SiN_x bi-layer PV1 to achieve good PBTS and NBTS stability, simultaneously.