[AMDp1] Oxide TFTs

[AMDp1-7] Study on Promoting Transmittance on Dielectric Multi-layers for IGZO LCD Displays

*Ningbo Yi^1,2, Lixia Li², Sibang Long², Sen Yan², Feng Zhao² (1. Peking University Shenzhen Graduate School (China), 2. Shenzhen China Star Optoelectronics Technology Co., LTD (China))

Keywords: IGZO, Transmittance, GI/PV multi-layers

It was demonstrated that the layered structure of SiOx and SiNx is a good candidate to be gate insulator and passivation layers in IGZO TFT. However, this multi-layered structure could introduce issues of transmittance at aperture area in single glass of TFT side based optics physics. It is a good solution to improve the transmittance via optmizing structures of GI and PV layers, which could be adopted in IGZO-TFT LCD displays.