Oral Session HP2

[HP2-02] Exploring Plasma-Based Deposition Environments via Energy-Resolved Time-of-Flight Mass Spectrometry

*Caroline Hain^1,2, Malte Watzek^2,3, Patrick Sturm³, Carsten Stoermer³, Abdelhak Bensaoula³, Thomas Nelis^1,2 (1. Empa, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, 2. BFH, Bern University of Applied Sciences, Institute for Applied Laser, Photonics and Surface Technologies, 3. TOFWERK AG)