Oral Session HP2

[HP2-03] 11 years of ground state density mapping in HiPIMS: from scientific trials to industry-grade research

*Nikolay Britun¹, Jaroslav Hnilicai ², Masaru Hori¹, Kazuhiro Hikida², Kazutaka Fujiwara² (1. Center for Low-temperature Plasma Sciences, Nagoya University, 2. Mitsubishi Materials Corporation Innovation Center )