ISSP2024

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Oral Presentation

3.Pulsed Sputtering and HiPIMS

Oral Session HP2

Thu. Jul 4, 2024 10:40 AM - 12:30 PM Room O (Science Hall)

11:50 AM - 12:10 PM

[HP2-04] Time-of-Flight Technology for Environmental, Material Science, and Semiconductor Applications

Marleen Vetter1, *Marc Gonin1, Carla Fege1, Seiichi Shimizu2, Abdel Bensaoula1 (1. TOFWERK, Thun, Switzerland, 2. TOFWERK, Japan)

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