ISSP2024

Presentation information

Poster Presentation

Poster Session

Poster Session P3

Wed. Jul 3, 2024 5:40 PM - 7:10 PM Room P (Atrium)

5:40 PM - 7:10 PM

[P3-20] Environmental temperature sputtering by magnetic mirror-type magnetron cathode

*Taisei Motomura1, Kenshin Takemura1, Toshimi Nagase1, Nobutomo Morita1, Wataru Iwasaki1, Naoki Matsuda1, Tatsuo Tabaru1 (1. AIST)

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