Effect of discharge pulse length on GaN thin films by high-density convergent plasma sputtering device

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Poster Presentation

Poster Session

Wed. Jul 3, 2024 5:40 PM - 7:10 PM Room P (Atrium)

5:40 PM - 7:10 PM

Itsuki Misono¹, *Taisei Motomura², Masato Uehara², Tatsuo Tabaru², Tetsuya Okuyama^1,3 (1. NIT, Kurume College, 2. AIST, 3. Kyushu Univ.)

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